Introduction to Microlithography
by Thompson, Larry F.; Willson, C. Grant; Bowden, Murrae J.Edition: 2nd
Format: Hardcover
Pub. Date: 1994-05-05
Publisher(s): American Chemical Society
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Summary
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
Table of Contents
| An Introduction to Lithography | |
| The Lithographic Process: The Physics | |
| Organic Resist Materials | |
| Resist Processing | |
| Plasma Etching | |
| Table of Contents provided by Publisher. All Rights Reserved. |
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